Orthophosphoric acid ≥85%, CMOS for microelectronic, J.T.Baker®
Supplier: AVANTOR PERFORMANCE MATERIAL LLC
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Danger
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Synonyms:
Phosphoric acid
Management of Change (MOC) category = R
BAKR0274-11
BAKR0274-AN
0274-A7
BAKR0274-11
JT0274-11CS
7962.59
USD
JT0274-11
JT0274-AN
JT0274-A7
CAJT0274-11
Orthophosphoric acid ≥85%, CMOS for microelectronic, J.T.Baker®
Orthophosphoric acid
Formula:
H₃PO₄ MW: 98 g/mol Melting Pt: 28 °C Density: 1.71…1.87 g/cm³ (25 °C) Storage Temperature: Ambient |
MDL Number:
MFCD00011340 CAS Number: 7664-38-2 EINECS: 231-633-2 UN: 1805 ADR: 8,III |
Specification Test Results
For Microelectronic Use | |
Store at temperatures above 22°C (72°F) | |
Assay (H₃PO₄) (by acidimetry) | 85.0 - 87.0 % |
Color (APHA) | ≤10 |
Specific Gravity at 60°/60°F | 1.691 - 1.710 |
Reducing Substances | Passes Test |
Volatile Acids (µeq/g) | ≤0.16 |
Chloride (Cl) | ≤1.0 ppm |
Nitrate (NO₃) | ≤2 ppm |
Sulfate (SO₄) | ≤12 ppm |
Trace Impurities - Aluminum (Al) | ≤0.500 ppm |
Trace Impurities - Antimony (Sb) | ≤10.000 ppm |
Trace Impurities - Arsenic (As) | ≤0.050 ppm |
Trace Impurities - Calcium (Ca) | ≤1.500 ppm |
Trace Impurities - Chromium (Cr) | ≤0.200 ppm |
Trace Impurities - Cobalt (Co) | ≤0.050 ppm |
Trace Impurities - Copper (Cu) | ≤0.050 ppm |
Trace Impurities - Gold (Au) | ≤0.300 ppm |
Trace Impurities - ACS - Heavy Metals (as Pb) | ≤5 ppm |
Trace Impurities - Iron (Fe) | ≤2.0 ppm |
Trace Impurities - Lead (Pb) | ≤0.300 ppm |
Trace Impurities - Lithium (Li) | ≤0.100 ppm |
Trace Impurities - Magnesium (Mg) | ≤0.20 ppm |
Trace Impurities - Manganese (Mn) | ≤0.100 ppm |
Trace Impurities - Nickel (Ni) | ≤0.200 ppm |
Trace Impurities - Potassium (K) | ≤1.500 ppm |
Trace Impurities - Sodium (Na) | ≤2.500 ppm |
Trace Impurities - Strontium (Sr) | ≤0.100 ppm |
Trace Impurities - Titanium (Ti) | ≤0.300 ppm |
Trace Impurities - Zinc (Zn) | ≤2.000 ppm |
Particle Count at point of fill - 0.5 µm and greater | |
Particle Count at point of fill - 1.0 µm and greater | |
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