Xylene (mixture of isomers) ≥99.5%, CMOS for microelectronic, J.T.Baker®

Supplier: AVANTOR PERFORMANCE MATERIAL LLC
Danger

Synonyms: Dimethylbenzene

Management of Change (MOC) category = R

BAKR9493-14 BAKR9493-14 9493-03
JT9493-14CS 239.71 USD
JT9493-14 CAJT9493-14 JT9493-3
Xylene (mixture of isomers) ≥99.5%, CMOS for microelectronic, J.T.Baker®
Xylene (mixture of isomers)
Formula: C₆H₄(CH₃)₂
MW: 106.17 g/mol
Boiling Pt: 140 °C (1013 hPa)
Melting Pt: –34 °C
Density: 0.86…0.88 g/cm³ (20 °C)
Flash Pt: 25 °C
Storage Temperature: Ambient
MDL Number: MFCD00077264
CAS Number: 1330-20-7
EINECS: 215-535-7
UN: 1307
ADR: 3,III
Merck Index: 13,10136
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Specification Test Results

For Microelectronic Use
Color (APHA) ≤10
Residue after Evaporation ≤5 ppm
Acidity (µeq/g) ≤0.3
Water (H₂O) ≤0.02 %
Chloride (Cl) ≤3 ppm
Phosphate (PO₄) ≤0.5 ppm
Trace Impurities - Aluminum (Al) ≤50.0 ppb
Arsenic and Antimony (as As) ≤10.0 ppb
Trace Impurities - Barium (Ba) ≤20.0 ppb
Trace Impurities - Boron (B) ≤20.0 ppb
Trace Impurities - Cadmium (Cd) ≤20.0 ppb
Trace Impurities - Calcium (Ca) ≤50.0 ppb
Trace Impurities - Chromium (Cr) ≤50 ppb
Trace Impurities - Cobalt (Co) ≤20 ppb
Trace Impurities - Copper (Cu) ≤10.0 ppb
Trace Impurities - Gallium (Ga) ≤50 ppb
Trace Impurities - Germanium (Ge) ≤100.0 ppb
Trace Impurities - Gold (Au) ≤50 ppb
Heavy Metals (as Pb) ≤1000.0 ppb
Trace Impurities - Iron (Fe) ≤50.0 ppb
Trace Impurities - Lead (Pb) ≤100 ppb
Trace Impurities - Lithium (Li) ≤50.0 ppb
Trace Impurities - Magnesium (Mg) ≤20 ppb
Trace Impurities - Manganese (Mn) ≤20.0 ppb
Trace Impurities - Nickel (Ni) ≤10.0 ppb
Trace Impurities - Potassium (K) ≤100 ppb
Trace Impurities - Silicon (Si) ≤200.0 ppb
Trace Impurities - Silver (Ag) ≤50 ppb
Trace Impurities - Sodium (Na) ≤100.0 ppb
Trace Impurities - Strontium (Sr) ≤20.0 ppb
Trace Impurities - Tin (Sn) ≤100 ppb
Trace Impurities - Zinc (Zn) ≤20.0 ppb
Particle Count - 1.0 µm and greater ≤10 par/ml
Total of p-, m-, o-xylene, toluene and ethylbenzene (by GC) ≥99.5 %

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