Titanium etchant TFTN semiconductor grade

Supplier: Transene
Danger

0033000-QT 0033000-GAL
76540-948EA 46.18 USD
76540-948 76540-937
Titanium etchant TFTN semiconductor grade
Titanium etchant

Titanium Etchant TFTN is HF-free with a slow etch rate for fine line etching of titanium films. Will not attack glass/oxide.

Boiling Pt: 109 °C
Melting Pt: -74 °C
Density: 1.12 g/cc
Storage Temperature: Ambient
UN: 1789
ADR: 8,II

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Specification Test Results

Appearance Clear, colorless
Etch Capacity (rate declines at ~70%) 65 g/gallon
Etch Rate at 70°C 10 Å/sec
Etch Rate at 85°C 50 Å/sec
Filtration 0,2 um
Incompatible Materials Cu, Al
pH Strongly acidic
Recommended Operating Temperatures 20-80°C (30-40°C most common) °C
Shelf Life 1 Year
Storage Conditions Ambient

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