Orthophosphoric acid ≥85%, Low-Metal (LM) grade semiconductor grade

Supplier: Transene
Danger

Synonyms: Phosphoric acid

PHOPLM-QT PHOPLM-GAL
76540-958CS 238.52 USD
76540-958 76540-976
Orthophosphoric acid ≥85%, Low-Metal (LM) grade semiconductor grade
Orthophosphoric acid

Transene Phosphoric Acid LM is a "low metals" phosphoric acid acid solution suitable for demanding semiconductor and electronics processing.

Formula: H₃PO₄
MW: 98 g/mol
Boiling Pt: 178-180 °C (water)
Density: 1.49 g/cc
Storage Temperature: Ambient
MDL Number: MFCD00011340
CAS Number: 7664-38-2
UN: 1805
ADR: 8,III

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Specification Test Results

Assay (H3PO4) 85.00 -- 87.00 %
Insoluble Matter 10 ppb max.
Color 7 APHA max.
Aluminum (Al) 30 ppb max.
Antimony (Sb) 700 ppb max.
Arsenic (As) 40 ppb max.
Calcium (Ca) 100 ppb max.
Chloride (Cl) 100 ppb max.
Chromium (Cr) 40 ppb max.
Copper (Cu) 20 ppb max.
Iron (Fe) 100 ppb max.
Lead (Pb) 20 ppb max.
Lithium (Li) 10 ppb max.
Magnesium (Mg) 20 ppb max.
Manganese (Mn) 10 ppb max.
Nickel (Ni) 45 ppb max.
Nitrate (NO3) 100 ppb max.
Potassium (K) 100 ppb max.
Sodium (Na) 150 ppb max.
Sulfate (SO4) 500 ppb max.
Titanium (Ti) 10 ppb max.
Zinc (Zn) 50 ppb max.
Particle Count, 0.5 um 20 ct/ml max.
Particle Count, 1.0 um 10 ct/ml max.

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