ScrubKITS™, Surface Starter Cleaning Kits, Foamtec

Supplier: Foamtec
HT4500-ALTWDEP1 HT4500-SHWHD1 HT4500-LAMSPDM HT4500-LAMSQ1
76247-316CS 127.44 USD
76247-316 76247-310 76247-314 76247-312
ScrubKITS™, Surface Starter Cleaning Kits, Foamtec
Wipes Cleaning Kits and Pads
Vacuum chamber PM ScrubKITS™ are pre-packed maintenance kits containing all the tools necessary to safely PM CVD, Plasma Etch, PVD, PECVD, MOCVD, ion implant and ALD vacuum chambers. Vacuum chamber ScrubKITS™ allow equipment and process engineers to strictly control the items used to PM vacuum chambers.

  • Wide grit selection allows for quick removal of process-induced residue from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear
  • The fiber-free construction of ScrubDISKS® greatly reduces particle levels in cleaned vacuum chambers
  • Unique bonding technology minimizes the release of abrasive particles leading to cleaner vacuum chamber PM procedures
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