Xylene (mixture of isomers) ≥99.00%
Supplier: KMG
Synonyms:
Dimethylbenzene
200554
71009-384CS
1045.02
USD
71009-384
Xylene (mixture of isomers) ≥99.00%
Xylene (mixture of isomers)
Xylene can be used as a negative resist developer in semiconductor applications. Xylene is also mixed with HMDS, then spun on to a wafer to aid in adhesive of photoresist to the silicon wafer.
Formula:
C₆H₄(CH₃)₂ MW: 106.17 g/mol Boiling Pt: 140 °C (1013 hPa) Melting Pt: –34 °C Density: 0.86…0.88 g/cm³ (20 °C) Flash Pt: 25 °C |
MDL Number:
MFCD00077264 CAS Number: 1330-20-7 UN: 1307 ADR: 3,III |
Specification Test Results
Assay (Xylene) |
|
Assay (H2O) | 0,20% |
Color | 10 |
Acidity | 0.300µeq/g |
Residue After Evaporation | 5000 ppb |
Chloride | 3000 ppb |
Phosphate | 1000 ppb |
Sulfur Compounds | 30 ppb |
Infared | Conform |
Appearance | Conform |
Sustance Darkening (by H2SO4) | Conform |
Aluminum | 100 ppb |
Antimony | 2 ppb |
Antimony | 10 ppb |
Arsenic | 10 ppb |
Boron | 100 ppb |
Calcium | 100 ppb |
Chromium | 100 ppb |
Copper | 10 ppb |
Gold | 100 ppb |
Iron | 100 ppb |
Lead | 100 ppb |
Magnesium | 100 ppb |
Manganese | 100 ppb |
Nickel | 10 ppb |
Potassium | 100 ppb |
Sodium | 100 ppb |
Tin | 100 ppb |
Titanium | 100 ppb |
Zinc | 100 ppb |
1.0µ Particle Count | 10 par/ml |
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