HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥100%, Low-Metal (LM) grade

Supplier: Transene
Danger

Synonyms: Hexamethyldisilazane

100-HMDS100-GAL 100-HMDS100-QT
76541-038EA 186.73 USD
76541-038 76540-986
HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥100%, Low-Metal (LM) grade
HMDS (1,1,1,3,3,3-Hexamethyldisilazane)

Transene Hexamethyldisilzane LM (HMDS) is an ultra-high purity, "low metals" adhesion promoter for photoresists and other photolithography applications.

Formula: (CH₃)₃SiNHSi(CH₃)₃
MW: 161.39 g/mol
Boiling Pt: 125 °C
Melting Pt: –80 °C
Density: 0.77 g/cc
Flash Pt: 12.7 °C (closed cup)
Storage Temperature: Ambient
MDL Number: MFCD00008259
CAS Number: 999-97-3
UN: 2924
ADR: 3.8,II

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Specification Test Results

Assay (HMDS) 99.92 min %
Water (H2O) 50 ppm max.
Color 10 APHA max.
Chloride (Cl) 2 ppm max.
Trailing Impurity 0.024 % max.
UV abs at 270 nm 0.039-0.115
Aluminum (Al) 0.8 ppb max.
Arsenic and Antimony (as As) 0.4 ppb max.
Barium (Ba) 0.03 ppb max.
Beryllium (Be) 0.16 ppb max.
Bismuth (Bi) 0.02 ppb max.
Boron (B) 3 ppb max.
Cadmium (Cd) 0.2 ppb max.
Calcium (Ca) 2.2 ppb max.
Chromium (Cr) 1 ppb max.
Cobalt (Co) 0.1 ppb max.
Copper (Cu) 0.5 ppb max.
Gallium (Ga) 0.1 ppb max.
Germanium (Ge) 0.12 ppb max.
Gold (Au) 0.08 ppb max.
Iron (Fe) 0.2 ppb max.
Lead (Pb) 0.2 ppb max.
Lithium (Li) 0.1 ppb max.
Magnesium (Mg) 0.3 ppb max.
Manganese (Mn) 0.2 ppb max.
Molybdenum (Mo) 0.3 ppb max.
Nickel (Ni) 0.4 ppb max.
Potassium (K) 0.4 ppb max.
Silver (Ag) 0.1 ppb max.
Sodium (Na) 0.88 ppb max.
Strontium (Sr) 0.1 ppb max.
Tantalum (Ta) 0.12 ppb max.
Thallium (Tl) 2 ppb max.
Tin (Sn) 0.2 ppb max.
Titanium (Ti) 2 ppb max.
Vanadium (V) 0.4 ppb max.
Zinc (Zn) 0.7 ppb max.
Zirconium (Zr) 0.2 ppb max.
Particle Count, 1.0 mm 10 ct/ml max.
Particle Count, 0.5 mm 20 ct/ml max.
Particle Count, 0.3 mm 50 ct/ml max.
Particle Count, 0.2 mm 90 ct/ml max.

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