HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥100%, Low-Metal (LM) grade
Supplier: Transene
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Danger
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Synonyms:
Hexamethyldisilazane
100-HMDS100-GAL
100-HMDS100-QT
76541-038EA
186.73
USD
76541-038
76540-986
HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥100%, Low-Metal (LM) grade
HMDS (1,1,1,3,3,3-Hexamethyldisilazane)
Transene Hexamethyldisilzane LM (HMDS) is an ultra-high purity, "low metals" adhesion promoter for photoresists and other photolithography applications.
Formula:
(CH₃)₃SiNHSi(CH₃)₃ MW: 161.39 g/mol Boiling Pt: 125 °C Melting Pt: –80 °C Density: 0.77 g/cc Flash Pt: 12.7 °C (closed cup) Storage Temperature: Ambient |
MDL Number:
MFCD00008259 CAS Number: 999-97-3 UN: 2924 ADR: 3.8,II |
Specification Test Results
Assay (HMDS) | 99.92 min % |
Water (H2O) | 50 ppm max. |
Color | 10 APHA max. |
Chloride (Cl) | 2 ppm max. |
Trailing Impurity | 0.024 % max. |
UV abs at 270 nm | 0.039-0.115 |
Aluminum (Al) | 0.8 ppb max. |
Arsenic and Antimony (as As) | 0.4 ppb max. |
Barium (Ba) | 0.03 ppb max. |
Beryllium (Be) | 0.16 ppb max. |
Bismuth (Bi) | 0.02 ppb max. |
Boron (B) | 3 ppb max. |
Cadmium (Cd) | 0.2 ppb max. |
Calcium (Ca) | 2.2 ppb max. |
Chromium (Cr) | 1 ppb max. |
Cobalt (Co) | 0.1 ppb max. |
Copper (Cu) | 0.5 ppb max. |
Gallium (Ga) | 0.1 ppb max. |
Germanium (Ge) | 0.12 ppb max. |
Gold (Au) | 0.08 ppb max. |
Iron (Fe) | 0.2 ppb max. |
Lead (Pb) | 0.2 ppb max. |
Lithium (Li) | 0.1 ppb max. |
Magnesium (Mg) | 0.3 ppb max. |
Manganese (Mn) | 0.2 ppb max. |
Molybdenum (Mo) | 0.3 ppb max. |
Nickel (Ni) | 0.4 ppb max. |
Potassium (K) | 0.4 ppb max. |
Silver (Ag) | 0.1 ppb max. |
Sodium (Na) | 0.88 ppb max. |
Strontium (Sr) | 0.1 ppb max. |
Tantalum (Ta) | 0.12 ppb max. |
Thallium (Tl) | 2 ppb max. |
Tin (Sn) | 0.2 ppb max. |
Titanium (Ti) | 2 ppb max. |
Vanadium (V) | 0.4 ppb max. |
Zinc (Zn) | 0.7 ppb max. |
Zirconium (Zr) | 0.2 ppb max. |
Particle Count, 1.0 mm | 10 ct/ml max. |
Particle Count, 0.5 mm | 20 ct/ml max. |
Particle Count, 0.3 mm | 50 ct/ml max. |
Particle Count, 0.2 mm | 90 ct/ml max. |
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