HMDS (1,1,1,3,3,3-hexamethyldisilazane), Semiconductor grade (Honeywell 17713)

Supplier: Honeywell Research Chemicals
Danger

Synonyms: Hexamethyldisilazane

40215H-1L
BJ40215H-1LEA 985.39 USD
BJ40215H-1L
HMDS (1,1,1,3,3,3-hexamethyldisilazane), Semiconductor grade (Honeywell 17713)
HMDS (1,1,1,3,3,3-Hexamethyldisilazane)

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Formula: (CH₃)₃SiNHSi(CH₃)₃
MW: 161.39 g/mol
Boiling Pt: 126 °C (1.013 hPa)
Melting Pt: -80 °C
Density: 0.770…0.775 g/cm³ (20 °C)
Flash Pt: 25.9 %(V)
Storage Temperature: Ambient
MDL Number: MFCD00008259
CAS Number: 999-97-3
EINECS: 213-668-5
UN: 3286
ADR: 3,II
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Specification Test Results

Assay (GC) Min. 98 %
Density (D 20/4) 0.770 - 0.775
Refractive index (n 20/D) 1.4070 - 1.4090
Non-volatile matter Max. 5 ppm
Aluminium (Al) Max. 0.1 ppm
Arsenic, antimony (as As) Max. 0.01 ppm
Calcium (Ca) Max. 0.1 ppm
Copper (Cu) Max. 0.1 ppm
Iron (Fe) Max. 0.1 ppm
Sodium (Na) Max. 0.5 ppm
Lead (Pb) Max. 0.05 ppm
Zinc (Zn) Max. 0.1 ppm
Chloride (Cl) Max. 5 ppm

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